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Country - France
Summary - Supply Of Post-Etching Cleaning Equipment For Beol Applications
Deadline - Nov 10, 2025
GT reference number - 119858937
Product classification - Microelectronic machinery and apparatus
Address - France
Contact details - 565656565
Tender notice no. - 76454545
GT Ref Id - 119858937
Document Type - Tender Notices
Description - Description: For its research activities, which aim to develop 10 nm FDSOI technologies and beyond, CEA-Leti wishes to acquire post-etching cleaning equipment for its clean room. The equipment is intended to process 300mm wafers by carrying out diffe rent chemical treatments for BEOL applications and must be fully automated.The proposed market includes the following options:- Options with mandatory encryption: Option 1: Ability to perform an N2 purge of the FOUP - Options with optional encryption:Option 2: Adapted addition of H2O2 during the HardMask removal process Option 3: Mechanical assistance to chemical processes Option 4: 1st level Maintenance TrainingOption 5: Advanced Maintenance Tra
Gt Ref Id - 119858937
Deadline - Nov 10, 2025
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