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Country - France
Summary - Supply Of A Multi Purpose Cmp In Integrated Cmp Metrology Module
Deadline - Jun 03, 2025
GT reference number - 109177214
Product classification - Microelectronic machinery and apparatus
Address - France
Contact details - 565656565
Tender notice no. - 76454545
GT Ref Id - 109177214
Document Type - Tender Notices
Description - Description: For its research activities, CEA-LETI wishes to acquire an integrated measurement system for its EBARA FREX200M2 chemical mechanical polishing tool, a chemo-mechanical polishing tool. This equipment must process 200 mm platelets and must be fully integrated and connected to the CMP tool.This equipment will be used as a measurement system to control the CPM process. It must be integrated and connected to the new 200 mm CEA-Leti tool. The metrology tool must be able to perform automatic measurements on silicon or glass substrates. It must manipulate and measure silicon plates of 200 mm, with different materials deposited, such as silicon oxide, silicon nitride, poly-silicium on si
Gt Ref Id - 109177214
Deadline - Jun 03, 2025
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