Supply Of 300Mm Plasma Engraving Equipment.

  Address - France

  Contact details - 565656565

  Tender notice no. - 76454545

  GT Ref Id - 113613152

  Document Type - Tender Notices

Description - Description: For its research activities focused on the development of FD-SOI technologies of 10 Nm and beyond, CEA-LETI wishes to acquire a new plasma engraving tool in order to meet the technological challenges to come. The equipment will have to i nclude an engraving chamber for Alcu and Tin type materials for feol and beol applications. A specific stripping room must be associated with the engraving chamber. The equipment should be able to be completed with a multi-material engraving chamber as well as a fine oxide engraving chamber. The market includes • Options with compulsory costing o Option n ° 1 The supply of a multi-material chamber o Option n ° 2 The supply of a silicon oxide

Gt Ref Id - 113613152

Deadline - Aug 18, 2025