Resist/Polymer Coater (Izm-09.1) (Pr888803-2590-P)

  Address - Germany

  Contact details - 565656565

  Tender notice no. - 76454545

  GT Ref Id - 109634068

  Document Type - Tender Notices

Description - Description: Description: 1 Resist / Polymer Coater:- Automated Resist Processing System with four wet process modules- Automated handling for 200mm, 150mm and 100mmSix hotplate modules- Two high solvent plates-E HMDS steam plateOptional features:- m ust be able to change system configurations/software to process Wafer that consist of a shape material. Total thickness up to 900 µmThe system should be able to handle and process Mold-Wafer, whereby the sheet of this wafer can be up to 2mm- Possibility to load cassettes with less than 25 slots and to enlarge the distance between the individual slots- Options handler for warps (2 mm default of a 200 mm substrate)- The software should support the

Gt Ref Id - 109634068

Deadline - Jun 23, 2025