Supply Of Chemical Mechanical Polishing Equipment With Integrated Cleaning And Drying Modules

  Address - France

  Contact details - 565656565

  Tender notice no. - 76454545

  GT Ref Id - 81166939

  Document Type - Tender Notices

Description - Description: CEA-Leti wishes to purchase mechanical-chemical polishing equipment with integrated cleaning and drying modules.The equipment is aimed at FEOL and MEOL applications without cross-metal contamination. The equipment must be capable of perf orming parallel processing of batches of wafers with different levels of contamination. The materials involved in this type of polishing are silicon, silicon oxide, nitride, tungsten and other metallic materials.This equipment will be installed in the CEA clean room. It is intended to process 200mm plates. It must be able to integrate a metrology module.This contract includes the following mandatory options:- Option 1: Level 1 maintenance trainin

Gt Ref Id - 81166939

Deadline - May 20, 2024