Supply Of 300Mm Plasma Engraving Equipment

  Address - France

  Contact details - 565656565

  Tender notice no. - 76454545

  GT Ref Id - 113128402

  Document Type - Tender Notices

Description - Description: For its research activities focused on the development of FD-SOI technologies of 10 Nm and beyond, CEA-LETI wishes to acquire a new plasma engraving tool in order to meet the technological challenges to come.The equipment will have to in clude an engraving chamber for Alcu and Tin type materials for feol and beol applications. A specific stripping room must be associated with the engraving chamber. The equipment should be able to be completed with a multi-material engraving chamber as well as a fine oxide engraving chamber.The market has: • Options with compulsory encryption: o Option n ° 1: the supply of a multi-material roomo option n ° 2: the supply of a silicon oxide bedr

Gt Ref Id - 113128402

Deadline - Jul 26, 2025