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Country - France
Summary - Supply And Installation Of A Metrology Instrument By Spectroscopy Of Photoelectrons X (Xps) For Online Control Of The Thickness
Deadline - login to view
GT reference number - 109813972
Product classification - Microelectronic machinery and apparatus
Address - France
Contact details - 565656565
Tender notice no. - 76454545
GT Ref Id - 109813972
Document Type - Tender Notices
Description - Description: The CEA-Leti wishes to equip itself with an instrument of metrology by spectroscopy of photoelectrons X (XPS) for online control of the thickness, composition and states of connections of materials deposited in thin layers for technologi cal nodes 10 nm and below. This equipment will be installed in the ISO 4 class white room. It will have to allow the automated measurement of dimensional test structures (100*100) µm² on 300 and 200 mm diameter plates. It will have to have three monochromatic X -ray sources so as to cover, at least, a spectral range between 1.5 KEV and 5.4 KEV. The equipment will have to comply with the constraints inherent in the Use in the white room for the
Gt Ref Id - 109813972
Deadline - Nov 30, -0001
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