Qub/2306/22 Supply, Delivery, Installation And Commissioning Of A Physical Vapour Deposition (Pvd) Thin Film Deposition Cluster - Request For Information

  Address - United Kingdom

  Contact details - 565656565

  Tender notice no. - 76454545

  GT Ref Id - 80844971

  Document Type - Tender Notices

Description - Description: Queen’s University Belfast ("Queen’s") seeks to engage with providers of Thin Film Deposition Cluster Tools for the UKRI Smart Nano NI Project activity being delivered by Queen’s. At present we have a technical requirement for an i nstrument that includes;- 1. A wafer handling system/robot (150mm or 200mm) and load-lock that can provide to a multiple of process chambers (options for single wafer or cassette loading).- 2. A Physical Vapour Deposition (PVD) process module 1 - with up to eight (8) sources capable of coverage of 150 mm wafer with high uniformity.- 3. A PVD process module 2 - with up to six (6) sources capable of coverage of 150 mm wafer with high uniformity.- 4

Gt Ref Id - 80844971

Deadline - Aug 24, 2023