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Country - United Kingdom
Summary - 904 - Compound Semiconductor Plasma Processing Equipment
Deadline - login to view
GT reference number - 75162290
Product classification - Laboratory, optical and precision equipments (excl. glasses)
Address - United Kingdom
Contact details - 565656565
Tender notice no. - 76454545
GT Ref Id - 75162290
Document Type - Tender Notices
Description - The College of Engineering and Physical Sciences (EPS) at Aston university is creating a III-V semiconductor fabrication facility. As a consequence, we are seeking a single supplier to provide a suite of plasma processing tools for:• ICP Etch of se miconductor materials (e.g. GaAs, GaN, InP, GaSb)• RIE Etch of dielectric materials (e.g. SiO2, SiNx) and metals (e.g. Au, Ge, Cr, Ti, Pt, Pd)• Deposition of dielectric layers (e.g. SiO2, SiNx)The full project specific requirements and equipment specification can be found within the project question set on Aston University’s e-tendering portal ProContract under Section 11 – Project Specific Requirements.
Gt Ref Id - 75162290
Deadline - Jan 12, 2024
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